Name:
ISO/TS 21383:2021 PDF
Published Date:
03/01/2021
Status:
Active
Publisher:
International Organization for Standardization (Technical Standard)
ISO/TS 21383:2021 describes methods to qualify the scanning electron microscope with the digital imaging system for quantitative and qualitative SEM measurements by evaluating essential scanning electron microscope performance parameters to maintain the performance after installation of the instruments. The items and evaluating methods of the performance parameters are selected by users for their own purposes.
| Edition : | 1st |
| File Size : | 1 file , 12 MB |
| Note : | This product is unavailable in Russia, Ukraine, Belarus |
| Number of Pages : | 66 |
| Published : | 03/01/2021 |
